GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding

摘要

We demonstrate GaN-based distributed-feedback surface-emitting lasers grown on sapphire substrates with a two-dimensional (2D) square-lattice photonic crystal (PhC) that forms a high-aspect-ratio void array (void diameter: 65 nm and depth: 220 nm). The 2D PhC layer acts as both distributed-feedback grating and p-type optical cladding of a separate confinement heterostructure. To form the 2D PhC in the nitride semiconductor layers, we developed an embedding process that uses mass-transport phenomena. Crystallographic facets appeared on the inner walls of the embedded voids. Room-temperature lasing action was observed at 406.0 nm for a PhC lattice constant of 162.5 nm. The threshold current density was 9.7 kA/cm~2 for a 120-μm-square p-contact electrode.