Herringbone buckling patterns of anisotropic thin films on elastomeric substrates

摘要

Highly ordered herringbone buckling patterns have been observed in stiff thin films on elastomeric substrates under an equibiaxial compression. Existing mechanics models assume the thin film to be isotropic, which does not agree with recent experiments of single crystal thin films (e.g., silicon) on elastomeric substrates, where the film has cubic symmetry with anisotropic material properties. A theoretical model for herringbone buckling patterns of anisotropic thin films on elastomeric substrates is developed in this paper. The prediction of the buckling directions agrees well with experiments. The approximation of the use of isotropic material properties is also analyzed.