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Hole mobility enhancement in ln_(0.41)Ga_(0.59)Sb quantum-well field-effect transistors

机译:ln_(0.41)Ga_(0.59)Sb量子阱场效应晶体管中的空穴迁移率增强

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摘要

The impact of (110) uniaxial strain on the characteristics of p-channel ln_(0.41)Ga_(0.59)Sb quantum-well field-effect transistors (QW-FETs) is studied through chip-bending experiments. Uniaxial strain is found to affect the linear-regime drain current and the threshold voltage of the FET through the modulation of the hole mobility of the two-dimensional hole gas (2DHG) in the QW-FET. The piezoresistance coefficients of the 2DHG have been determined to be π<110>=1.17 × 10~(-10) cm~2/dyn and π⊥<110>=-1.9× 10~(-11) cm~2/dyn. The value of π<110> is 1.5 times that of holes in Si metal-oxide-semiconductor (MOS) field-effect transistors and establishes InGaSb as a promising material system for a future III-V complementary MOS (CMOS) technology.
机译:通过芯片弯曲实验研究了(110)单轴应变对p沟道ln_(0.41)Ga_(0.59)Sb量子阱场效应晶体管(QW-FET)特性的影响。发现单轴应变通过调制QW-FET中的二维空穴气体(2DHG)的空穴迁移率来影响线性区漏极电流和FET的阈值电压。确定2DHG的压阻系数为π<110> = 1.17×10〜(-10)cm〜2 / dyn和π⊥<110> =-1.9×10〜(-11)cm〜2 / dyn 。 π<110>的值是Si金属氧化物半导体(MOS)场效应晶体管中空穴的1.5倍,并建立了InGaSb作为未来III-V互补MOS(CMOS)技术的有前途的材料系统。

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  • 来源
    《Applied Physics Letters》 |2011年第5期|p.053505.1-053505.3|共3页
  • 作者单位

    Microsystems Technology Laboratories, Massachusetts Institute of Technology (MIT), Cambridge,Massachusetts 02139, USA;

    Naval Research Laboratory, Washington, DC 20375, USA;

    Naval Research Laboratory, Washington, DC 20375, USA;

    Naval Research Laboratory, Washington, DC 20375, USA;

    Microsystems Technology Laboratories, Massachusetts Institute of Technology (MIT), Cambridge,Massachusetts 02139, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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  • 入库时间 2022-08-18 03:17:45

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