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Deep level transient spectroscopy and minority carrier lifetime study on Ga-doped continuous Czochralski silicon

机译:Ga掺杂的连续直拉硅的深层瞬态光谱学和少数载流子寿命研究

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摘要

Continuous-Czochralski (c-Cz) crystal growth has been suggested as a viable technique for the fabrication of photovoltaic Si wafers due to its low resistivity variation of any dopant, independent of segregation, compared to conventional Cz. In order to eliminate light induced degradation due to boron-oxygen traps in conventional p-type silicon wafers, gallium doped wafers have been grown by c-Cz method and investigated using four point probe, deep level transient spectroscopy (DLTS), and microwave-photoconductance decay. Iron-gallium related electrically active defects were identified using DLTS as the main lifetime killers responsible for reduced non-uniform lifetimes in radial and axial positions of the c-Cz silicon ingot. A direct correlation between minority carrier lifetime and the concentration of electrically active Fe-Ga pairs was established.
机译:与常规Cz相比,连续Czochralski(c-Cz)晶体生长已被认为是制造光伏Si晶片的可行技术,因为其任何掺杂剂的低电阻率变化均不受偏析影响。为了消除传统p型硅晶片中由于硼-氧陷阱而引起的光致退化,已通过c-Cz方法生长了掺杂镓的晶片,并使用四点探针,深能级瞬态光谱法(DLTS)和微波技术对它们进行了研究。光电导衰减。使用DLTS作为主要的寿命杀手,确定了与铁镓有关的电活性缺陷,这些缺陷是造成c-Cz硅锭径向和轴向位置不均匀寿命减少的原因。建立了少数载流子寿命与电活性Fe-Ga对浓度之间的直接关系。

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  • 来源
    《Applied Physics Letters 》 |2012年第22期| 222107.1-222107.4| 共4页
  • 作者单位

    Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA;

    Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA;

    GT Advanced Technologies, Hazelwood, Missouri 63042, USA;

    Department of Physics, North Carolina State University, Raleigh, North Carolina 27695, USA;

    Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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