Electrostatically actuated membranes made from silica thin films

摘要

We present a method for fabricating flexible nano-scale membranes using surface micromachining and silica thin films. Standard microfabrication techniques are used, and the membrane can be moved using electrostatic forces. The degree of deflection is set by an applied voltage, and the devices can be fully collapsed (100 nm movement) by applying approximately 150 V. Deflection tests were performed using an optical profilometer when the area under the membrane was filled with air and water. Published by AIP Publishing.