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Large-Area Metal Gaps and Their Optical Applications

机译:大面积金属间隙及其光学应用

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摘要

Recent technological advances in fabrication methods have allowed researchers to manipulate light-matter interactions in the subwavelength region and develop a wide variety of innovative optical applications from the visible to the microwave region. Metal patterning at a subwavelength scale plays a crucial role in realizing these optical applications. Various standard lithography techniques including laser beam machining, focused ion beam, photolithography, and electron-beam lithography are used for the subwavelength feature size of the metal patterns. Many recent studies have demonstrated that funneling light into nanometer-wide gaps in metals gives rise to strong field enhancements and nonlocal electromagnetic effects. However, these standard methods encounter difficulties when one tries to fabricate nanometer feature sizes with macroscopic circumferences, crucial for long-wavelength applications, over a large area. Here, new lithography techniques that fabricate an array of metal gaps of nanometer-to-angstrom ngstrom scale are covered. The corresponding photonic applications in the terahertz and microwave regions are also introduced. These next-generation metal gaps will have a great impact on the advancement of field enhancement and confinement toward the next level of applications such as metamaterials, quantum tunneling, active switching devices, and ultrasensitive chemical/biological sensors.
机译:制造方法的最新技术进步已使研究人员能够处理亚波长区域内的光-物质相互作用,并开发了从可见光到微波区域的各种创新光学应用。亚波长规模的金属图案在实现这些光学应用中起着至关重要的作用。金属图案的亚波长特征尺寸使用各种标准光刻技术,包括激光束加工,聚焦离子束,光刻和电子束光刻。最近的许多研究表明,将光聚集到金属中的纳米级间隙中会引起强场增强和非局部电磁效应。然而,当试图在大面积上制造对于长波长应用至关重要的具有宏观圆周的纳米特征尺寸时,这些标准方法遇到困难。在此,涵盖了制造纳米级至埃级的金属间隙阵列的新光刻技术。还介绍了太赫兹和微波地区的相应光子应用。这些下一代金属间隙将极大地影响磁场增强的发展,并将其限制在超材料,量子隧穿,有源开关器件和超灵敏化学/生物传感器等下一级别应用中。

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