Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition

著录项

• 来源
  《Advanced Materials》 |2015年第35期|5223-5229|共7页
• 作者

  Ahn Chisung; Lee Jinhwan; Kim Hyeong-U; Bark Hunyoung; Jeon Minhwan; Ryu Gyeong Hee; Lee Zonghoon; Yeom Geun Young; Kim Kwangsu; Jung Jaehyuck; Kim Youngseok; Lee Changgu; Kim Taesung;

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• 作者单位

  Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, Gyeonggi Do, South Korea;

  Sungkyunkwan Univ, Sch Mech Engn, Suwon 440746, Gyeonggi Do, South Korea;

  Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, Gyeonggi Do, South Korea;

  Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, Gyeonggi Do, South Korea;

  Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, Gyeonggi Do, South Korea;

  Ulsan Natl Inst Sci & Technol UNIST, Sch Mat Sci & Engn, Ulsan 689798, South Korea;

  Ulsan Natl Inst Sci & Technol UNIST, Sch Mat Sci & Engn, Ulsan 689798, South Korea;

  Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, Gyeonggi Do, South Korea|Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Suwon 440746, Gyeonggi Do, South Korea;

  Samsung Elect, Semicond R&D Ctr, Hwaseong 445701, Gyeonggi Do, South Korea;

  Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, Gyeonggi Do, South Korea;

  Sungkyunkwan Univ, Sch Mech Engn, Suwon 440746, Gyeonggi Do, South Korea;

  Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, Gyeonggi Do, South Korea|Sungkyunkwan Univ, Sch Mech Engn, Suwon 440746, Gyeonggi Do, South Korea;

  Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, Gyeonggi Do, South Korea|Sungkyunkwan Univ, Sch Mech Engn, Suwon 440746, Gyeonggi Do, South Korea;

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• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  flexible sensor; low temperature; molybdenum disulfide (MoS2); plasma-enhanced chemical vapor deposition (PECVD); plastic substrate;

  机译：柔性传感器;低温;二硫化钼（MoS2）;等离子体增强化学气相沉积（PECVD）;塑料基板;