Precursor Decomposition, Microstructure, and Porosity of Yttria Stabilized Zirconia Thin Films Prepared by Aerosol-Assisted Chemical Vapor Deposition

摘要

Microstructures of yttria stabilized zirconia thin films deposited by aerosol assisted chemical vapor deposition (AA-CVD) are correlated with the thermal decomposition behavior of the corresponding metal precursors, zirconium and yttrium 2,4-pentanedionate. Process conditions of AA-CVD are investigated with the aim of producing dense and compact YSZ thin films for applications as gas-tight electrolyte. Based on systematic cross sectional scanning transmission electron microscopy (STEM) investigations and conductivity measurements, the development of percolating nanoporosity is observed in samples prepared at temperatures between 350 ℃ and 600 ℃ at standard solution throughput. Compact columnar thin films with bulk conductivity are obtained at 600 ℃ by reducing the metal content of the precursor solution and at 450 ℃ by reducing the solution throughput.