Growth of NdBa_2Cu_3O_7-δ superconducting thin films on SrTiO_3(100) and laSrGaO_4(100) substrates

摘要

NdBa_2Cu_3O_7-δsuperconducting thin films were grown on SrTiO_3(100) and LaSrGaO4(100) substrates by off-axis rf sputtering and pulsed laser deposition. The effects of several deposition parameters, e.g. gas pressure, substrate temperature and energy density were studied. Thin films grown by off-axis rf sputtering were highly c-axis oriented, but those by pulsed laser deposition were predominantly a-axis oriented under our deposition conditions.