Noise as Diagnostic Tool for Quality and Reliability of MEMS

摘要

This perspective explores future research approaches on the use of noise characteristics of microelectromechanical systems (MEMS) devices as a diagnostic tool to assess their quality and reliability. Such a technique has been applied to electronic devices. In comparison to these, however, MEMS have much more diverse materials, structures, and transduction mechanisms. Correspondingly, we must deal with various types of noise sources and a means to separate their contributions. In this paper, we first provide an overview of reliability and noise in MEMS and then suggest a framework to link noise data of specific devices to their quality or reliability. After this, we analyze 13 classes of MEMS and recommend four that are most amenable to this approach. Finally, we propose a noise measurement system to separate the contribution of electrical and mechanical noise sources. Through this perspective, our hope is for current and future designers of MEMS to see the potential benefits of noise in their devices.