6-Axis Stress Tensor Sensor Using Multifaceted Silicon Piezoresistors

摘要

A tensor sensor can be used to measure deformations in an object that are not visible to the naked eye by detecting the stress change inside the object. Such sensors have a wide range of application. For example, a tensor sensor can be used to predict fatigue in building materials by detecting the stress change inside the materials, thereby preventing accidents. In this case, a sensor of small size that can measure all nine components of the tensor is required. In this study, a tensor sensor consisting of highly sensitive piezoresistive beams and a cantilever to measure all of the tensor components was developed using MEMS processes. The designed sensor had dimensions of 2.0 mm by 2.0 mm by 0.3 mm (length by width by thickness). The sensor chip was embedded in a 15 mm3 cubic polydimethylsiloxane (PDMS) (polydimethylsiloxane) elastic body and then calibrated to verify the sensor response to the stress tensor. We demonstrated that 6-axis normal and shear Cauchy stresses with 5 kPa in magnitudes can be measured by using the fabricated sensor.