Biophotonic sensors with integrated Si

摘要

a The Si3N4 chip combines a SiNOH laser array with an array of sensors, illustrated as Mach-Zehnder interferometers (MZI), and is placed in a cartridge (black) containing windows for optical pumping and read-out. The sensor comprises a microfluidic chamber with an in- and outlet for the liquid analyte solution, which is formed by the chip surface, the cartridge lid, and an elastic seal (blue) between the chip surface and lid acting as the chamber sidewalls. The integrated SiNOH lasers are pumped by an external light source with a large pump spot size such that high-precision alignment is not needed. The light originating from the sensor output is radiated from the chip to a read-out camera by grating couplers. b Simplified schematic of the MZI-based sensor. Each MZI contains one sensing and one reference arm. The sensing arms are functionalized with individual antibodies AB1, AB2, and AB3 that bind specific target molecules M1, M2, and M3, respectively, to the WG surfaces