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Application of a Novel CVD TiN Coating on a Biomedical Co–Cr Alloy: An Evaluation of Coating Layer and Substrate Characteristics

机译:新型CVD TiN涂层在生物医学Co-Cr合金上的应用:涂层和基体特性的评估

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摘要

Titanium nitride (TiN) was deposited on the surface of a cobalt–chromium (Co–Cr) alloy by a hot-wall type chemical vapor deposition (CVD) reactor at 850 °C, and the coating characteristics were compared with those of a physical vapor deposition (PVD) TiN coating deposited on the same alloy at 450 °C. Neither coating showed any reactions at the interface. The face-centered cubic (fcc) structure of the alloy was changed into a hexagonal close-packed (hcp) phase, and recrystallization occurred over at 10 μm of depth from the surface after CVD coating. Characteristic precipitates were also generated incrementally depending on the depth, unlike the precipitates in the matrix of the as-cast alloy. On the other hand, the microstructure and phase of the PVD-coated alloy did not change. Depth-dependent nano-hardness measurements showed a greater increase in hardness in the recrystallization zone of the CVD-coated alloy than in the bulk center of the alloy. The CVD coating showed superior adhesion to the PVD coating in the progressive scratch test. The as-cast, PVD-coated, and CVD-coated alloys all showed negative cytotoxicity. Within the limitations of this study, CVD TiN coating to biomedical Co–Cr alloy may be considered a promising alternative to PVD technique.
机译:氮化钛(TiN)通过热壁式化学气相沉积(CVD)反应器在850°C的温度下沉积在钴铬(Co-Cr)合金的表面上,并将涂层特性与物理涂层的特性进行了比较。气相沉积(PVD)TiN涂层在450°C时沉积在同一合金上。两种涂层在界面上均未显示任何反应。将合金的面心立方(fcc)结构更改为六方密堆积(hcp)相,并在CVD涂层后距表面10μm的深度发生重结晶。与铸态合金基体中的沉淀不同,取决于深度,特征性沉淀也会逐渐产生。另一方面,PVD涂层合金的显微组织和相没有改变。深度相关的纳米硬度测量结果表明,CVD涂层合金的重结晶区中的硬度增加量大于合金的本体中心处的硬度增加量。在逐步划痕测试中,CVD涂层对PVD涂层表现出优异的附着力。铸态,PVD涂层和CVD涂层合金均显示出负面的细胞毒性。在这项研究的局限性内,生物医学Co-Cr合金的CVD TiN涂层可能被认为是PVD技术的有前途的替代方法。

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