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Microstructure and optical properties of Ag/ITO/Ag multilayer films

机译:Ag / ITO / Ag多层膜的微观结构和光学性质

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摘要

Transflective and highly conductive Ag/ITO/Ag multilayer films were prepared by magnetron sputtering on glass substrates. The microstructure and optical properties of Ag/ITO/Ag multilayer films were systematically investigated by X-ray diffraction, scanning electron microscopy, and ultraviolet-visible spectroscopy. The optical properties of the multilayer films were significantly influenced by the thickness of the Ag surface layer from 3.0 to 12.6 nm. The multilayer film of Ag9.3nm/ITO142nm/Ag9.3nm shows the best comprehensive property. It could satisfy the requirement for transflective LCD.
机译:通过磁控溅射在玻璃基板上制备透反射和高导电性的Ag / ITO / Ag多层膜。通过X射线衍射,扫描电子显微镜和紫外可见光谱系统地研究了Ag / ITO / Ag多层膜的微观结构和光学性能。 Ag表面层的厚度为3.0至12.6nm,多层膜的光学性能受到显着影响。 Ag9.3nm / ITO142nm / Ag9.3nm多层膜表现出最好的综合性能。可以满足半透半反液晶显示器的要求。

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