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Flexible integration of free-standing nanowires into silicon photonics

机译:将独立的纳米线灵活集成到硅光子学中

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摘要

Silicon photonics has been developed successfully with a top-down fabrication technique to enable large-scale photonic integrated circuits with high reproducibility, but is limited intrinsically by the material capability for active or nonlinear applications. On the other hand, free-standing nanowires synthesized via a bottom-up growth present great material diversity and structural uniformity, but precisely assembling free-standing nanowires for on-demand photonic functionality remains a great challenge. Here we report hybrid integration of free-standing nanowires into silicon photonics with high flexibility by coupling free-standing nanowires onto target silicon waveguides that are simultaneously used for precise positioning. Coupling efficiency between a free-standing nanowire and a silicon waveguide is up to ~97% in the telecommunication band. A hybrid nonlinear-free-standing nanowires–silicon waveguides Mach–Zehnder interferometer and a racetrack resonator for significantly enhanced optical modulation are experimentally demonstrated, as well as hybrid active-free-standing nanowires–silicon waveguides circuits for light generation. These results suggest an alternative approach to flexible multifunctional on-chip nanophotonic devices.
机译:硅光子学已成功通过自上而下的制造技术进行开发,以实现具有高可重复性的大规模光子集成电路,但本质上受到有源或非线性应用的材料能力的限制。另一方面,通过自下而上的生长合成的自立式纳米线呈现出极大的材料多样性和结构均匀性,但是精确组装自立式纳米线以实现按需光子功能仍然是一个巨大的挑战。在这里,我们通过将独立式纳米线耦合到同时用于精确定位的目标硅波导上,将独立式纳米线混合集成到具有高灵活性的硅光子学中。在电信频段中,独立式纳米线和硅波导之间的耦合效率高达〜97%。实验证明了混合非线性独立式纳米线-硅波导马赫-曾德尔干涉仪和跑道共振器,用于显着增强光调制,以及混合有源独立式纳米线-硅波导电路用于发光。这些结果表明了一种灵活的多功能片上纳米光子器件的替代方法。

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