A Method for Simultaneously Measuring 6DOF Geometric Motion Errors of Linear and Rotary Axes Using Lasers

摘要

A novel method for simultaneously directly measuring six-degrees-of-freedom (6DOF) geometric motion errors of CNC machine tools was proposed, and a corresponding measurement system was developed. This method can not only be applied for measuring a linear axis, but also for a rotary axis. A single-mode fiber was used to separate the measuring unit from the laser source in order to ensure system thermal stability and measurement accuracy. The method has the advantages of high efficiency and good accuracy, and requires no complicated decoupling calculation. The positioning error of the linear axis and radial motion error of the rotary axis are measured by laser interferometry and other 5DOF geometric motion errors by laser collimation. A series of experiments were performed to verify the feasibility and effectiveness of the developed measurement system.