Analysis of Deflection Enhancement Using Epsilon Assembly Microcantilevers Based Sensors

摘要

The present work analyzes theoretically and verifies the advantage of utilizing ɛ-microcantilever assemblies in microsensing applications. The deflection profile of these innovative ɛ-assembly microcantilevers is compared with that of the rectangular microcantilever and modified triangular microcantlever. Various force-loading conditions are considered. The theorem of linear elasticity for thin beams is used to obtain the deflections. The obtained defections are validated against an accurate numerical solution utilizing finite element method with maximum deviation less than 10 percent. It is found that the ɛ-assembly produces larger deflections than the rectangular microcantilever under the same base surface stress and same extension length. In addition, the ɛ-microcantilever assembly is found to produce larger deflection than the modified triangular microcantilever. This deflection enhancement is found to increase as the ɛ-assembly’s free length decreases for various types of force loading conditions. Consequently, the ɛ-microcantilever is shown to be superior in microsensing applications as it provides favorable high detection capability with a reduced susceptibility to external noises. Finally, this work paves a way for experimentally testing the ɛ-assembly to show whether detective potential of microsensors can be increased.