Analysis of Detection Enhancement Using Microcantilevers with Long-Slit-Based Sensors

摘要

The present work analyzes theoretically and verifies the advantage of utilizing rectangular microcantilevers with long-slits in microsensing applications. The deflection profile of these microcantilevers is compared with that of typical rectangular microcantilevers under the action of dynamic disturbances. Various force-loading conditions are considered. The theory of linear elasticity for thin beams is used to obtain the deflection-related quantities. The disturbance in these quantities is obtained based on wave propagation and beam vibration theories. It is found that detections of rectangular microcantilevers with long-slits based on maximum slit opening length can be more than 100 times the deflections of typical rectangular microcantilevers. Moreover, the disturbance (noise effect) in the detection quantities of the microcantilever with long-slits is found to be always smaller than that of typical microcantilevers, regardless of the wavelength, force amplitude, and the frequency of the dynamic disturbance. Eventually, the detection quantities of the microcantilever with long-slits are found to be almost unaffected by dynamic disturbances, as long as the wavelengths of these disturbances are larger than 3.5 times the microcantilever width. Finally, the present work recommends implementation of microcantilevers with long-slits as microsensors in robust applications, including real analyte environments and out of laboratory testing.