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Effects of Electrodes on the Switching Behavior of Strontium Titanate Nickelate Resistive Random Access Memory

机译:电极对钛酸锶镍电阻阻随机存取存储器开关行为的影响

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摘要

Strontium titanate nickelate (STN) thin films on indium tin oxide (ITO)/glass substrate were synthesized using the sol-gel method for resistive random access memory (RRAM) applications. Aluminum (Al), titanium (Ti), tungsten (W), gold (Au) and platinum (Pt) were used as top electrodes in the STN-based RRAM to probe the switching behavior. The bipolar resistive switching behavior of the set and reset voltages is in opposite bias in the Al/STN/ITO and Pt/STN/ITO RRAMs, which can be partly ascribed to the different work functions of top electrodes in the ITO. Analyses of the fitting results and temperature-dependent performances showed that the Al/STN/ITO switching was mainly attributed to the absorption/release of oxygen-based functional groups, whereas the Pt/STN/ITO switching can be associated with the diffusion of metal electrode ions. The Al/STN/ITO RRAM demonstrated a high resistance ratio of >106 between the high-resistance state (HRS) and the low-resistance state (LRS), as well as a retention ability of >105 s. Furthermore, the Pt/STN/ITO RRAM displayed a HRS/LRS resistance ratio of >103 and a retention ability of >105 s.
机译:使用溶胶-凝胶法在电阻式随机存取存储器(RRAM)应用中合成了氧化铟锡(ITO)/玻璃基板上的钛酸锶镍酸酯(STN)薄膜。铝(Al),钛(Ti),钨(W),金(Au)和铂(Pt)被用作基于STN的RRAM中的顶部电极,以探测开关行为。在Al / STN / ITO和Pt / STN / ITO RRAM中,置位电压和复位电压的双极电阻切换行为具有相反的偏置,这可以部分归因于ITO中顶部电极的不同功函数。对拟合结果和温度相关性能的分析表明,Al / STN / ITO转换主要归因于氧基官能团的吸收/释放,而Pt / STN / ITO转换可能与金属的扩散有关电极离子。 Al / STN / ITO RRAM在高电阻状态(HRS)和低电阻状态(LRS)之间显示出> 10 6 的高电阻比,并且保持能力> 10 5 秒。此外,Pt / STN / ITO RRAM的HRS / LRS电阻比> 10 3 ,保留能力> 10 5 s。

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