在线真空计比较法校准技术研究

摘要

This paper introduces a kind of B-A type Pirani vacuum gauge as a vice vacuum gauge calibration work,online comparsion method with vacuum gauge calibration.The author through a standard vacuum gauge to work with,measure the same vacuum environment at the same time,data computing and analysis,gives the correction factor and its measurement uncertainty.In orderr to verify the ceracity and reliabilily of the prospective technology dissemnation,through the vice standard vacuum gauge performance test and online compare calibration.Think the technology can be solved in the filed of scientific resesrch and production of vacuum gauge calibration online.%介绍了采用B-A型和皮拉尼复合真空计做为副标准计,在线校准工作用真空计的方法.通过使用副标准真空计与在线工作用真空计同时测量同一真空环境,进行数据运算及分析,判断在线真空计的主要技术性能指标,给出其修正因子及测量不确定度.为了验证该校准技术量值传递的准确性及可靠性,通过对副标准真空计相关性能测试及在线进行比较校准,认为该技术是可以解决科研及生产领域中真空计的在线校准.