Automated vacuum gauge calibration system

摘要

An automated system for calibrating vacuum gauges over the pressure range of 10(sup (minus)6) to 0.1 Pa was designed and constructed at the National Institute of Standards and Technology (NIST) for the Department of Energy (DOE) Primary Standards Laboratory at Sandia National Laboratories (SNL). Calculable pressures are generated by passing a known flow of gas through an orifice of known conductance. The orifice conductance is derived from dimensional measurements and accurate flows are generated using metal capillary leaks. The expanded uncertainty (k = 2) in the generated pressure is estimated to be between 1% and 4% over the calibration range. The design, calibration results. and component uncertainties will be discussed.