An in-stu calibration apparatus of vacuum gauge by absolute and comparison method

摘要

The present invention is to sequentially expand the volume of gas in the different vacuum chamber, the pressure in the vacuum chamber calculation using a standard vacuum gauge in a static method reference standards for absolute calibration is made on the development of a device that can be compared to the calibration orifice of the vacuum gauge according to the gas flow control method in the in-situ conditions without the movement of the vacuum gauge. Technical details related to the reference vacuum gauge and absolute calibration orifice gas flow control method combines technology, vacuum gauge calibration by comparison of the static method, based on the low pressure caused by the high vacuum region in vacuum technology and calibration techniques, how to stabilize the gas flow orifices by techniques related to the vacuum gauge comprises a calibration comparison. The present invention relates to a absolute calibration and the calibration is compared to each other that the two devices is possible only in a correction device improved correction time and the moving speed correction such as correction efficiency in the development of new combination device of the vacuum gauge.