电真空器件清洁处理

摘要

The surface of the parts and components of the vacuum electronic devices need clean. In the process of manufacturing vacuum electronic devices,the influence of the oil and contamination on the electroplating,brazing and coating the attenuating material was investigated. The method of removing the oil and contamination in the process of manufacturing vacuum electronic devices was ultrasonic with degreasing agent. The cleaning technology of vacuum elec-tronic devices was determined. In order to ensure the cleaning of the vacuum electronic devices,the process of cleaning the vacuum electronic devices was determined.%电真空器件要求零件和部件表面洁净度高、没有油污。研究在制造真空电子器件工艺过程中油污对电镀、钎焊和衰减材料涂覆的影响。提出采用超声加去油溶液的方式去除制管过程中的油污，确定了电真空器件的清洗工艺，保证其清洁性。降低器件表面的出气率，保证阴极发射水平和电子枪的耐压强度，提高器件的可靠性和使用寿命。