微型硅谐振式压力传感器的研制

摘要

A thermally excited and piezo-resistor detected silicon resonant pressure sensor of high accuracy has been developed by microelectronic mechanical system(MEMS) technology. The resonator of the sensor has a high quality factor of more than 10000 in vacuum. With a special close-loop self-excited method, the pressure sensor is characterized. The sensitivity is 12.2?Hz/kPa over a range of 0～400?kPa with a linear correlation coefficient of 0.999?9. The overall accuracy is better than 0.1%.%利用微电子机械加工技术成功地研制出电热激励、压阻拾振的高精度硅谐振梁式压力传感器。传感器的谐振器的品质因素Q值在真空中大于10?000。采用特殊闭环自激振荡方式测定压力传感器的压力特性，压力测试范围0～400?kPa，线性相关系数0.999?9，测试精度优于0.1%FS。