一种用于微喷的感应加热器设计与仿真

摘要

提出了一种用于热微喷头的感应加热器新结构.进行了相关的结构和工艺设计,在MEMS工艺环境下制作出了可以非接触加热,工艺结构简单,使用寿命长的微感应加热器.使用ANSYS对微感应加热器进行了建模和仿真分析,结果显示:感应加热器的最大加热功率可达到5 mW以上,满足设计要求,同时得到了感应加热器的功率影响因素.%A new structure of micro inductive heater for micronozzle is proposed. The inductive heater has some advantages such as non-contact heating, simple process and long lifetime. The prototype of the heater is designed by theoretical calculation and fabricated in MEMS laboratory. The heating power is calculated and analyzed by ANSYS. It shows that the power of the inductive heater could exceed 5 mw. The result meets the design requirements.