MEMS技术在THz无源器件中的应用

摘要

The primary applications for terahertz (THz) technology have so far been high precision spectrum detection technology, superresolution imaging, and high performance communication et al. THz region locates on the border between far-IR and submillimeter which is still rather blurry. The dimension of THz devices is from several ten micrometers to several millimeters which are difficult or hard to fabricate by the traditional machining technology. MEMS technology has many advantages to fabricate these devices. An overview of recent progress in the research and development of MEMS antennas, transmission lines, waveguides structures, and slow wave structures and metamaterial devices based on DRIE,LIGA technologies for terahertz frequencies is presented. The advantages and disadvantages of MEMS technology and applications in THz devices fabrication are analyzed.%太赫兹技术将在未来高精度频谱探测技术、高分辨率成像和高性能通讯等应用前景良好.太赫兹技术处于电子学与光子学领域的交叉领域,太赫兹器件的尺寸在数十微米到毫米量级,传统的机械加工技术很难达到加工精度要求,甚至无法加工.MEMS技术在太赫兹器件的加工方面具有巨大的优势.总结了目前采用DRIE,LIGA等工艺加工太赫兹器件的研究现状,包括太赫兹传输波导器件、太赫兹传输线器件、慢波结构和特种复合结构的加工.分析了MEMS加工工艺的优缺点和在太赫兹器件加工中的应用前景.