新型高灵敏抗冲击集成光学加速度计

摘要

提出一种新型基于微环谐振腔的集成光学加速度计,该加速度传感器具有较高的灵敏度(56.6 mV/gn)和良好的抗冲击性能(可达105gn).介绍并分析了该加速度计的传感理论,建立了微环谐振腔耦合单元模型,通过Matlab软件和时域差分有限元(FDTD)法绘制了波导的模态传输曲线,优化了微环谐振腔的设计参数和微腔与波导的耦合间距,并且利用ANSYS给出了悬臂梁的承受冲击极限.最终,仿真结果与理论分析结果基本一致.该加速度计可为高灵敏抗冲击微光机电系统(MOEMS)传感器提供新思路和理论参考.%A novel integrated optical aceelerometer based on micro-ring resonator is proposed. The accelerometer has higher sensitivity (56.6 m V/gn) and good performance of shock resistance,which up to 105gn of acceleration. The sensing principle is described and analyzed. Model of micro-ring resonator coupling element is established. The waveguide mode transimission curve is drawn by Matlab software and the design parameters of micro-ring resonator and coupling spacing, which between microcavity and waveguide are optimized,by finite difference time domain ( FDTD) method. The limit of impact which the cantilever can withstand is given by ANSYS. The simulation result is correspondence with the theoretical analysis result. The aceelerometer can supply new idea and theoretical reference for high sensitivity and shock resistance MOEMS sensors.