A kind of design method for thermal gas mass flowmeter based on platinum film resistors on ceramic substrate is presented,principle of thermal gas flowmeter is analyzed,platinum resistive flow sensor based on ceramic substrate is made. In order to reduce power supply,through-hole scheme is proposed. A prototype is fabricated with a thermostatic control circuit and MSP430 MCU processing circuit. Calibration and test are implemented using sonic nozzle calibration device,measurement range of flowmeter is 500~1 500 kg/h,precision is ±0. 5%,and response time is 2 s,which meet demand for most industrial pipe air mass flow test,and has broad application prospects.%提出了一种基于陶瓷基体铂薄膜电阻热式气体质量流量计的设计方法,分析了热式气体流量计的原理,制作了陶瓷铂电阻流量敏感元件,为降低加热功耗,提出了通孔方案.设计了恒温差控制电路和MSP430单片机处理电路,并制作出了实际样机.采用音速喷嘴标定装置对样机进行了标定和测试,该流量计的测量范围500~1 500 kg/h,精度±0. 5%,响应时间2 s,能够满足大工业气体管道流量的测量要求,具有广阔的应用前景.
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