磁方位修正MEMS矢量水声传感器研制

摘要

介绍了一种磁方位补偿微机电系统(MEMS)矢量水声传感器.采用电容原理MEMS技术构造内部振子,并与信号处理电路紧靠方式设计,可减小噪声干扰并抑制信号衰减.利用磁方位修正技术,对MEMS矢量水声传感器判定的方位进行修正,解决了单个矢量水声传感器定向精度不高问题.传感器完成了国家一级计量站标定和磁方位误差修正测试,测试结果验证了定向方法的可行性,矢量水声传感器可实现水下目标探测、定位及导航等任务.%Research and fabrication of micro-electro-mechanical system(MEMS)vector hydrophone with magnetic bearing correction is introduced. The vector hydrophone is constructed with vibrators inside using capacitance theory MEMS technique,and the design adopts the way which close to signal processing circuit.It can reduce noise interference and suppress signal attenuation. Problem of low direction precision of single vector hydrophone is solved through magnetism bearing correction technique.The vector hydrophone completes calibration in national level metrology institute and test on magnetic azimuth error correction.The result shows the feasibility of method of vector hydrophone designed with magnetism direction compensation.The vector hydrophone can be used in underwater target detection and localization and navigation tasks.