二次电子发射能谱研究进展

摘要

This paper briefly introduces the concept of secondary electron emission energy spectrum, two measurement methods, and several representative measurement facilities of the secondary electron emission energy spectrum at home and abroad. Then, two famous secondary electron emission energy spectrum models, Vaughan model and Furman model, are discussed, with their advantages and disadvantages summarized. The theory, models and measurement of secondary electron emission energy spectrum are very important and have to be further researched, because of many problems not solved yet. In addition, as the one of the secondary electron emission properties, the relationship between secondary electron emission en-ergy spectrum and multipactor threshold also need to be investigated.%文章阐述了二次电子发射能谱的基本概念，介绍了两种比较常规的二次电子发射能谱测试方法，以及国内外比较具有代表性的二次电子发射能谱的测试设备。详细地阐述了当前Vaughan模型和Furman模型并对两个模型进行了详细的比较分析，总结了各自的优势与不足。研究表明二次电子发射能谱在二次电子发射研究领域具有非常重要的价值，不论是能谱本身的物理概念还是能谱的测试或是能谱的解析模型建立均具有重要的研究价值，但是三者的研究仍然存在很多的问题有待解决。另外，能谱作为二次电子发射特性之一，对于能谱与微放电阈值之间的关系也有待深入的研究。