用于微纳米几何量尺寸测量的三维微接触式测头

摘要

为实现微纳尺度器件三维几何形貌测量及表征，基于电容和压阻原理，开发了两种三维微接触式测头。其中电容测头测量范围4.5μm，轴向分辨力和横向分辨力分别为10 nm和25 nm；压阻测头测量范围4.6μm，轴向分辨力和横向分辨力分别为5 nm和10 nm。两种测头均可集成到纳米测量机，实现微结构几何参数的测量。%In order to realize dimensional measurement and charac-terization of miniaturized components in microano scale, two 3D micro tactile probes were developed based on capacitive and piezo-resistive principle. Range of capacitive probe is 4.5 μm, with a resolution of 10 nm and 25 nm in axial and lateral direction, respectively. The piezo-resistive probe has an axial and lateral resolution of 5 nm and 10 nm in full range of 4.6 μm. The two probes can be integrated to nano measuring machine to realize measurement of geometrical parameter in microstructures.