余弦误差在轮廓仪角度校准中的影响

摘要

Through analysing the causes of cosine error, this paper established the mathematical model of the cosine error, quantitatively evaluated the effects and trends under the different measuring angle. Experiments proved the reliability of the mathematical model. The research has a certain guiding role on the angle calibration of proiflometer with the stamdard control model.%通过分析校准过程中余弦误差产生的原因，建立了余弦误差的数学模型，定量评估了在不同的测量夹角下，余弦误差对于校准结果的影响程度以及影响趋势。实验验证了余弦误差数学模型的可靠性。该研究对使用标准轮廓样板进行轮廓仪角度示值误差的校准具有一定的指导作用。