of;
Optoelectronic;
Information,;
University;
of;
Electronic;
Science;
and;
Technology;
of;
China,;
Chengdu;
610054,;
China;
Key;
Laboratory;
of;
Electronic;
Thin;
Films;
and;
Integrated;
Devices,;
University;
of;
Electronic;
Science;
and;
Technology;
of;
China,;
Chengdu;
610054,;
China;
PECVD; 氢化非晶硅; 薄膜沉积; 电子性质; 构造演化; 磷掺杂; 等离子体增强化学气相沉积; a-Si; H薄膜;