振镜扫描系统对熔石英损伤的修复

摘要

Large damage（〉200μm） is fixed by galvanometer scanning method.Compared the effect by different powers and different scanning speeds. The size and depth of the fixed sites increases with the laser power, decreases with the laser scanning speed.Using ramped intensity power can effectively reduce the numbers of bubbles.Slowly increase the laser power do many times can eliminate the ablation.After mitigation,the threshold basically can reach the level before injury.%利用CO2激光器的振镜扫描修复装置对较大尺寸（≥200μm）的熔石英损伤点进行了定点修复，比较了功率和扫描速度对修复坑形貌的影响。修复后的面型大小以及深度随激光功率增加而增加，随激光扫描速度的提高而减小。先用较低功率作用，再用较高功率作用可以有效减少气泡的产生。利用激光功率缓慢递增多次作用的修复方法，可以消除烧蚀。修复后阈值基本上可以达到损伤前的水平，达到了提升损伤阈值的目的。