METHOD OF CONTROLLING GALVANOSCANNER, GALVANOSCANNER AND LASER MACHINING APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide a method of controlling a galvanoscanner with which a mirror is positioned at a high speed at any rocking angle, a galvanoscanner and a laser machining apparatus in which a hole is drilled on a printed substrate irradiated with a laser beam by using the galvanoscanner. PSOLUTION: An actuator 110 which rocks the mirror is operated on the basis of the deviation between a command signal 215 and a present position 242, and the operation amount of the actuator 110 is so corrected to eliminate a gain variation by preliminarily measuring the gain variation of the actuator 110 corresponding to the rocking angle. Thus, the influence of the variation in a torque constant corresponding to the rocking angle is suppressed, a response characteristic is uniformized over a whole scanning region and the positioning speed is increased. PCOPYRIGHT: (C)2005,JPO&NCIPI