基于旋转法的干涉仪系统误差标定

摘要

针对干涉仪高精度检测的需求,本文提出了旋转法标定干涉仪系统误差,实现绝对检测,从而提高检测精度.该方法根据Zemike多项式的性质,可以通过N次平分旋转和一次旋转法两种方法实现.本文对这两种方法分别做了详细的理论推导,并且给出具体实验结果与误差分析.实验结果表明,两种方法的测量结果基本一致,差值的PV值为0.006λ,RMS值为0.001λ.误差分析结果表明,一次旋转法的旋转误差小于N次平分法,因此一次旋转法是一种精度更高的方法.%To satisfy high precision testing of interferometer, rotation method to calibrate interferometer's system error is used for absolute test and improving precision. The method based on properties of Zemike polynomial, which can be realized in two ways: N-position and Two-position method. Theoretical analysis and experiments are taken on both N-position and two-position rotation methods, and results and error analysis are given. The experimental results show that the solutions of the two methods are nearly the same, and the PV value of the difference is 0.006 X, and RMS is 0.001 X. Error analysis show that the rotation error of two-position is smaller. So two-position method has higher precision than N-position method.