In2O3薄膜/锡掺杂玻璃光波导元件及其气敏性研究

摘要

A new method for detection of Volatile Organic Compounds (VOCs) is studied by using an optical waveguide sensor. The sensitive element was synthesized by Sol-Gel method and characterized with XRD pattem. The sensor was fabricated by coating the In2O3 thin film over a tin-doped glass OWG. The OWG sensor was fixed on the gas sensor system to detect the VOCs gases. The results show that the thin film has high sensitivity towards xylene gas at room temperature .This sensor responds significantly to 1×10-6(volume ratio) of xylene vapor.%本文提出利用金属氧化物半导体材料制备光波导气敏元件,检测挥发性有机物蒸汽的新方法.通过溶胶凝胶法制备了 In2O3 粉末并用 X-衍射对样品进行表征.采用提拉法在锡掺杂玻璃光波导表面制备 In2O3 薄膜,研制了 In2O3 薄膜/锡掺杂玻璃光波导传感元件,并对挥发性有机蒸汽进行检测.实验结果表明该元件对二甲苯具有较好的气敏性,在常温下该敏感元件对于浓度为 1×10-6(体积分数)的二甲苯蒸汽有比较明显响应.