建立了玻璃光波导气敏元件检测氯苯气体的方法.采用浸渍-提拉法将ZnO敏感膜固定在锡掺杂玻璃光波导表面,研制出了检测氯苯气体的ZnO薄膜/锡掺杂玻璃光波导气敏元件,并用该玻璃光波导气敏元件对挥发性有机气体进行了检测.实验结果表明,在室温下,气敏元件对氯苯气体有明显的响应,而对相同浓度的其它挥发性有机气体的响应相对较小,对氯苯气体的线性响应范围为5×10-4～1.2×10-5(V/V).所研制的ZnO薄膜/锡掺杂玻璃光波导气敏元件具有灵敏度高、响应速度快(响应时间8 s)、制作工艺简单和可逆性好等特点.%A nvoel method for the detection of chlorobenzene gas by using an optical waveguide sensor was described. The Zinc oxide thin films was fabricated by the sensitive element of this glass optical waveguide sensor with coating thin film of Zinc oxide on the surface of tin-diffused glass optical waveguide by dip coating. The optical waveguide sensor was used as a typical example to detect a kind of volatile organic compounds(VOCs) gas chlorobenzene. The results showed that the zinc oxide thin film has strong response to the chlorobenzene gas compared to other volatile organic compounds although they have same concentration. The sensor exhibits a linear response to chlorobenzene gas in the range of 5×10-4 to 1.2× 10-5( V/V ) with rapid response and good reversibility and responsive time was less than 8 s. The sensor has the advantages of high sensitivity, good reversibility and easy fabricated.
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