Effect of aluminium doping on structural and gas sensing properties of zinc oxide thin films deposited by spray pyrolysis

摘要

Physical and Materials Chemistry Division, National Chemical Laboratory, Homi Bhabha Road, Pashan, Pune 411008, India; Physical and Materials Chemistry Division, National Chemical Laboratory, Homi Bhabha Road, Pashan, Pune 411008, India, Emeritus Scientist (CSIR), Center for Materials for Electronics Technology, Pune 411008, India;%A facile spray pyrolysis route is used to deposit aluminium doped ZnO (AZO) thin films on to the glass substrates. It is observed that on aluminium doping the particle size of ZnO reduces significantly; moreover, uniformity of particle also gets enhanced. Their XRD study reveals that intensity ratio of crystal planes depend on the aluminium doping concentration. The gas response studies of; ~800nm thick Al-doped ZnO films at different operating temperatures show that 5 at% Al-doped ZnO thin film exhibits highest response towards H_2S gas at 200℃. The results suggest that the gas response strongly depends on the particle size and aluminium doping in the ZnO.