Composition for forming doped or non-doped zinc oxide thin film and method for producing zinc oxide thin film using same

摘要

A composition for preparing a zinc oxide thin film, which is easy to handle without pyrophoricity and which can form a non-doped zinc oxide thin film doped with a transparent Group 3B element by heating at 300 ° C or less, and a composition A method of obtaining a zinc oxide thin film doped with a transparent Group 3B element doped or undoped. The composition for preparing a zinc oxide thin film of the present invention comprises a product obtained by adding water to a solution of an organozinc compound or an organozinc compound and a Group 3B element compound and partially hydrolyzing the organozinc compound. When the Group 3B element compound is contained, the molar ratio to the organic zinc compound is 0.005 to 0.3. This composition is coated on the substrate surface and heated to form a zinc oxide thin film doped with a Group 3B element.