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COMPOSITION FOR FORMING DOPED OR NON-DOPED ZINC OXIDE THIN FILM, AND METHOD FOR PRODUCING ZINC OXIDE THIN FILM USING SAME
COMPOSITION FOR FORMING DOPED OR NON-DOPED ZINC OXIDE THIN FILM, AND METHOD FOR PRODUCING ZINC OXIDE THIN FILM USING SAME
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机译:用于形成掺杂的或未掺杂的氧化锌薄膜的组合物,以及使用相同的方法制备氧化锌薄膜的方法
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摘要
Disclosed is a composition for forming a zinc oxide thin film, which contains an organic zinc compound as a starting material, is not ignitable, and can be easily handled. The composition for forming a zinc oxide thin film is capable of forming a transparent zinc oxide thin film which is not doped or doped with a group 3B element by being heated at 300 °C or less. Also disclosed is a method for obtaining a transparent zinc oxide thin film, which is not doped or doped with a group 3B element, using the composition. Specifically, the composition for forming a zinc oxide thin film contains a product which is obtained by partially hydrolyzing an organic zinc compound by adding water to the organic zinc compound or a solution of the organic zinc compound and a group 3B element compound. In cases when a group 3B element compound is contained, the molar ratio of the group 3B element compound to the organic zinc compound is within the range of 0.005-0.3. The composition is applied to a substrate surface and then heated, thereby forming a zinc oxide thin film which is doped with the group 3B element.
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