双质量硅微陀螺仪驱动模态测试

摘要

考虑双线振动双质量硅微陀螺仪环境适应性强且两个质量块的差动输出能够有效消除共模干扰的影响,提出了一种新型双质量陀螺仪.依据双质量硅微陀螺的结构和工作原理,对该陀螺的驱动模态进行了理论分析,并提出了简化的动力学方程.利用ANSYS有限元软件对陀螺的驱动模态进行了数值仿真,并对陀螺仪样品进行了电路测试.通过几种不同的加载方式,分别得到了相应的仿真和测试的幅频曲线,结果表明,仿真和实验结果与理论分析完全一致,且双边驱动方式要优于单边驱动方式,反向驱动方式可以使陀螺仪在工作模态运动.仿真和实验结果验证了双质量硅微陀螺的驱动模态特性.%A new dual-mass gyro is studied in this paper,for double-linear vibrational dual-mass MEMS gyroscopes are insensitive to the environment, and their differential outputs can effectively suppress the common mode interference.On the basis of the structure and the principle of operation, the driving modal of the dual-mass gyro is analyzed in theory, and the simplified dynamic equations are proposed. Then, the finite element software ANSYS is used tonumerically simulate the driving modal,and a driving circuit is used to test the driving modal of a fabricated gyro sample. By using several loading methods in simulations and tests, the amplitude-frequency curves are obtained. These results are inagreement with the theory analysis,which shows that dual-side driving method is better than single-side driving one,and theopposite-direction driving method can drive a dual-mass gyro in working mode. Simulation and experiment results verify the driving-mode characteristics of this dual-mass micro-gyro.