Ti、C和Ti+C离子注入钢表面纳米相镶嵌复合层的形成

摘要

The C, Ti and Ti+C ions were implanted into H13 steel, and the cross-sections of the samples were observed by TEM. It is shown that the implanted layer structure has greatly changed. The complex mosaic layer with nano-meter phase is formed. The thickness of the complex layer is greater than the corresponding ion range. The difference of structure among the three ion implanted layers is obvious. The collision parameters of the ions were calculated using TRIM95, showing that the structure change is closely related to the collision parameters of the ions in steel. Finally the close coordination of structure change with implanted conditions were studied.%选取质量差异很大的C、Ti、Ti+C离子对钢进行了离子注入，用透射电子显微镜对注入样品横截面进行结构分析。结果表明，注入层结构发生了明显的变化，形成了纳米相镶嵌复合层，复合层的深度大约是相应离子射程的5.913.7倍。三种条件下注入，其结构变化有明显的差异。用TRIM95程序对三种离子注入的碰撞参数进行了计算，结果表明，结构的变化明显地与注入参数相关。最后分析了复合层特性的变化与注入条件和结构变化的关系。