单晶金刚石机械研磨与化学机械抛光工艺

摘要

单晶金刚石在工业、国防等领域的应用日益广泛，对其加工表面质量的要求不断提高，使用常温低压的化学机械抛光可实现金刚石的超光滑低损伤表面加工。通过理论分析及实验研究得出，使用硅酸盐玻璃材质研磨盘进行研磨加工，可以将金刚石表面粗糙度Ra降至15～25 nm，且无明显机械划痕；在2 MPa压力及室温环境下进行单晶金刚石化学机械抛光实验，优选出Fenton试剂酸性水基抛光液，使用该抛光液抛光单晶金刚石可获得粗糙度Ra值4 nm以下的光滑表面。%Single crystal diamond is more and more widely used in national defense and industrial field , which requires better surface quality .The technique of chemical-mechanical polishing at normal-tempera-ture and low-pressure environment can achieve ultra-smooth diamond surface with low damage .Theoreti-cal analysis and experimental research show that the polished diamond surface roughness Ra can be re-duced to 15—25 nm without obvious mechanical scratches by using silicate glass as grinding disc .The chemical-mechanical polishing experiment was held under the condition of 2 MPa pressure and normal-temperature .Experimental results show that the water-based acidic Fenton reagent was effective in parti-cular process parameters , and overall surface roughness Ra was processed to be less than 4 nm.