微V型槽阵列器件是光纤通讯设备的关键结构元件之一。随着光纤通讯技术的发展，利用传统刻蚀和切削的加工方法，已无法满足微V型槽高精度的要求。在分析了微V型槽阵列器件的设计要求，文章提出一种机床方案，基于精密机床的T型布局，采用金刚石成型砂轮，开发专用数控系统实现微V型槽阵列的高精密磨削。采用激光干涉仪对机床性能和定位精度进行测试分析，测得机床Z轴的定位精度误差达到±0．1μm。结果表明，该机床能达到预期的实时运动控制和定位精度要求，并流畅运行，验证了该方案的可行性和有效性。%The device of micro V-groove array is one of the key structure components of optical fiber com-munication equipment. With the development of optical fiber communication technology, using conventional etching and cutting machining method, unable to realize the high precision requirement of micro V-groove. On the analysis of the design requirements of the micro V-groove array device, a machine tool is proposed in this paper, based on the T layout of precision machine tools, develop special CNC system to realize high precision grinding micro V-groove arrays with special shape of diamond grinding wheel. With laser interfer-ometer, to analysis the measurement data of performance and positioning accuracy of NC machine tools, and to measure the positioning accuracy error of Z axis at the range of plus or minus 0. 1 μm. Results show that the machine tool is able to achieve requirements of the desired real-time motion control and positioning accura-cy, and the machine smooth running, so, verify the feasibility and effectiveness of the scheme.
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