磁悬浮直线电机三维有限元分析及优化设计研究

摘要

磁悬浮式运动平台易于实现大范围高精度的微运动,适合应用在精密加工和超精密测量领域.为了抑制磁悬浮直线电机电磁力谐波分量对控制系统的影响,提高磁悬浮运动平台的动态性能,以HALBACH型永磁同步直线电机为研究对象,提出了一种改进的直线电机动子HALBACH永磁阵列结构.利用有限元软件建立直线电机三维有限元模型,得到了电机水平推力和悬浮力波形,最后对电磁力波形进行了谐波分析.分析结果表明,采用优化的动子结构有效减小了直线电机电磁力波动,有利于提高磁悬浮运动平台的控制精度.%The magnetic suspension moving platform is easy to realize the micro motion with large scale and high precision, which is suitable for the application in the field of precision machining and ultra precision measuring. In order to inhibit the magnetic levitation linear motor electromagnetic force harmonic component influence on control system and improve the magnetic levitation motion platform dynamic performance, an improved HALBACH permanent magnet array structure of linear motor is proposed based on the research of HALBACH permanent magnet synchronous linear motor. The three dimensional finite element model of linear motor is established, and the waveform of the motor''s horizontal thrust and suspension force is obtained. Finally, harmonic analysis of electromagnetic force is carried out. The analysis results show that the optimization of the motional substructure can effectively reduce the Linear motor electromagnetic force fluctuation, it is advantageous to improve the control precision of the magnetic levitation motion platform.