激光干涉光刻技术应用概述

摘要

As a newly developing lithographic process,laser interference lithography has advantages of simple equipment,cost effective, great efficiency,high resolution,large areas processing and so on. The 1D,2D nanostructures,based on laser interference lithography has very promising application prospects in biosensors,solar cells,photonic crystals,etc.%激光干涉光刻作为一种新兴的光刻技术,具有设备结构简单、价格低廉、高效率、高分辨率和大视场曝光等特点.介绍通过激光干涉光刻产生的—维光栅结构、二维网格结构以及二维点阵结构在生物传感、太阳能电池和光子晶体等领域的应用前景.