利用红外线测温仪及示性物质Al2 O3、ZrO2分别对热源温度及对炉内某些特定部位的温度进行了直接测量，通过数值模拟对炉内温度变化进行了预测。研究结果表明，示性物质测温法为温度测量提供了一种新的参考方法，是红外线测温仪测温的有益补充；数值模拟合成炉温度场能够对炉内整体温度进行预测。表面负荷一定条件下，热源温度线性增加到一定温度以后基本保持不变。测试结果表明，碳化硅分解温度在2600～2700℃之间。%An infrared thermometer and characterizing substance Al2O3 and ZrO2 were used to directly measure the temperature of heat source and certain parts in the furnace respectively. The temperature variation in the furnace was predicted through numerical simulation. The research results show that the characterizing substance thermometry provides a new reference method for temperature measurement, which is a beneficial supplement to infrared thermometer. The numerical simulation of the temperature field in synthesis furnace can forecast the bulk temperature in the furnace. After the temperature of heat source linearly increases to a certain degree, it will remain unchanged under the condition of certain surface loading. Test result shows the decomposition temperature of SiC in the range of 2 600~2 700℃.
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