尺蠖压电驱动器具有大行程、高精度、大输出力、快速响应、无磁场影响等优点,在超精密定位领域具有广泛的应用前景.而行走式尺蠖压电驱动器又以箝位机构结构简单、刚度和动态性能好,中间驱动机构偏摆小,整体体积小,运动稳定性好等特性引起世界各国的关注.在阐述行走式尺蠖压电驱动器的本质、组成结构及运动原理的基础上,对其国内外研究现状及其关键技术进行了分析,并对其发展趋势进行了展望.%Piezoelectric inchworm actuators can achieve the ability of large displacement, high precision, large output force, fast response and no magnetic influence, so widely used in ultra-precision positioning are-a. Piezoelectric linear actuators of walker inchworm have the advantage of simple structure, high stiffness, good dynamic performance in clamping mechanism, and small deflection, compact structure, good motion stability in middle drive mechanism. The essence, composition and motion principle of piezoelectric linear actuators of walker inchworm were presented firstly. Then State-of-the-Art and key technologies of inchworm actuators were analyzed. Finally, the development trends of inchworm actuators were discussed.
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