低维度薄膜传热机理与表征

摘要

低维度薄膜传热学是建立在微小器件研究基础上的纳米学科分支之一.综述了细微尺度传热的主要方式,着重介绍了对流换热、热传导、热辐射、相变传热、微重力传热;详细阐述了导热系数的表征方式,包括温度传感器法、光声法、显微拉曼散射法、激光泵浦法、温度探测扫描电镜法、动态热线法.最后,分析与评述了国内外研发应用现状.%Heat transmission of lower dimensional films based on basic science of micro-device is a new branch of nano-science. The paper summarizes heat transmission model of micro-dimensional sizes, emphasizes on a few main heat transmission model: heat transfer by convection, by conduction, by radiation, by phase transition, and by microgravitational force, simultaneously, the characterizing methods of the thermal transmission co-effections included thermal sensor method; photo-acoustic method; micro-Rarnan scattering spectroscoy; laser optical-pump and probe measurement; a scanning thermal microscope (STHM); 3ω method etc are introduced. The measurement methods of thin film thermal conductivity are analyzed and reviewed finally.